发明名称 Temperature-regulating devices for reflective optical elements
摘要 Thermal-transfer devices (e.g., cooling devices) are disclosed for optical elements. An exemplary device includes a thermally conductive substrate having a surface. At least one mounting element extends from the surface to a reverse face of the optical element. The mounting element positions the optical element relative to the substrate with a gap between the surface and the reverse face. At least one gas-introduction port is situated relative to the gap. Also included is a gaseous thermal-conduction pathway across the gap between the optical element and the substrate. The thermal-conduction pathway includes flowing gas introduced (e.g., as a thin layer) into the gap by the gas-introduction port.
申请公布号 US2009147386(A1) 申请公布日期 2009.06.11
申请号 US20070001529 申请日期 2007.12.11
申请人 NIKON CORPORATION 发明人 SOGARD MICHAEL R.;WATSON DOUGLAS C.
分类号 G02B7/195 主分类号 G02B7/195
代理机构 代理人
主权项
地址