| 摘要 |
<p>A substrate holder, a substrate transfer apparatus, and a substrate treating system are provided to prevent damage to a supporting member in case the supporting member is contacted in a chamber wall by including a protective member in a front end of the supporting member. A fork(101) includes a peak base(117) fixed to a slider and a plurality of supporting peaks(119) connected to the peak base. The supporting peak of the fork has a main body(131) and a cap(133) detachably mounted in a front end of the main body as a protective member. A plurality of supporting protrusions(200) is detachably formed in a top surface of each supporting peak of the fork, and supports the substrate. The supporting protrusion is made of elastic material like rubber, PEEK resin, PTFE resin etc. The cap includes a convex part inserted inside the main body and a coating part which covers an adjacent part of the front end of the main body.</p> |
