| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a manufacturing method of an electrode structural body in which high airtightness can be obtained in a joining part of a tube composed of sintered aluminum nitride and a high melting point metal rod body. <P>SOLUTION: In the manufacturing method of the electrode structural body, the high melting point metal rod body 12 is loosely fitted into a hole part of the tube 11 made of the aluminum nitride sintered body, and the tube 11 and the rod body 12 are joined, and when the rod body 12 is loosely fitted into the tube 11, it is formed so that a joining scheduled face 14 of the tube and a joining scheduled face 15 of the rod body form an obtuse angle. Between the joining scheduled face 14 of the tube and the joining scheduled face 15 of the rod body, a mixed paste containing aluminum nitride and a high melting point metal is made to be interposed, the aluminum nitride and the high melting point metal in the mixed paste are sintered, and the tube 11 and the rod body 12 are joined. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
