<p>A method for making a waveguide comprises (a) providing a waveguide structure comprising a substrate (22), a lower cladding (20) layer on the substrate, and a core layer (24) comprising silicon nitride, amorphous silicon, or amorphous silicon-germanium alloy on the lower cladding layer; (b) patterning the core layer; and (c) annealing (28) the waveguide structure.</p>
申请公布号
WO2009073403(A1)
申请公布日期
2009.06.11
申请号
WO2008US84308
申请日期
2008.11.21
申请人
3M INNOVATIVE PROPERTIES COMPANY;ZHANG, JUN-YING;SMITH, TERRY L.;KOCH, BARRY J.;YI, YASHA
发明人
ZHANG, JUN-YING;SMITH, TERRY L.;KOCH, BARRY J.;YI, YASHA