| 摘要 |
PROBLEM TO BE SOLVED: To provide a minute electrode array with electrode material and insulation material therefor being all diamond and having a three-dimensional surface structure, and its manufacturing method. SOLUTION: This minute diamond electrode provided is characterized in that electrode portions and insulation portions of respective electrodes are all diamond as to a diamond electrode array surface and that the electrode portions each have a three-dimensional structure projecting from an insulation surface, and its manufacturing method is provided. COPYRIGHT: (C)2009,JPO&INPIT
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