APPARATUS AND METHOD FOR SUPPLYING OZONATED WATER MIXTURE, AND SUBSTRATE TREATING FACILITY USING THE SAME

摘要

An apparatus and a method for supplying ozone water mixture, and a substrate treating facility using the same are provided to regularly maintain supply flux and supply pressure of ozone water mixture by controlling a switching operation of a relief valve according to pressure variation of a distributor. A mixing unit(230) mixes ozone water to a treating solution. A distribution unit(240) distributes the ozone water mixture to treating units. A discharge unit(250) has a switching member(256) which switches a discharge line discharging the ozone water mixture inside the distribution unit. A pressure detecting unit(260) senses pressure inside the distribution unit. A control unit(270) receives a detection signal from the pressure detecting unit, and controls driving pressure of the switching member. A relief valve(256a) is installed on the discharge line. An air supply member(256b) supplies an air to the relief valve. A regulator(256c) is arranged between the air supply member and the relief valve.