| 摘要 |
PROBLEM TO BE SOLVED: To provide an SEM type inspection device improved in image quality and defect detection sensitivity by reducing pixel displacement when a two-dimensional image is formed by displacement of an electron beam irradiation position by deflection circuit noise generated in a constituent element of a beam deflection control circuit. SOLUTION: In the inspection device using an electron beam, an electron beam deflection control circuit includes a first deflection circuit part generating a signal of a component in an electron beam running direction, and a second deflection circuit part generating a signal of a component in the moving direction of an inspection object sample, and further includes a setting means for independently setting deflection circuit characteristics of the first and second deflection circuit parts. COPYRIGHT: (C)2009,JPO&INPIT
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