发明名称 Dip coating apparatus
摘要 A dip coating apparatus including a substrate supporter which supports a substrate to be coated and which has a gas discharger which has a plurality of holes formed therein from which a gas is discharged; a gas supplying passage through which the gas is supplied to the gas discharger; and a gas supplying valve which is disposed at a position in the gas supplying passage and in which the gas is fed to the gas discharger when the gas supplying valve is opened, wherein a pressure loss in the gas discharger is greater than two times a pressure loss in the gas supplying passage between the gas supplying valve and the gas discharger.
申请公布号 US6328800(B1) 申请公布日期 2001.12.11
申请号 US19990276728 申请日期 1999.03.26
申请人 RICOH COMPANY, LTD. 发明人 YAMAZAKI JUNICHI
分类号 B05C3/09;B05C13/02;G03G5/05;(IPC1-7):B05C3/00 主分类号 B05C3/09
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