发明名称 Method of forming semiconductor chips, the semiconductor chips so formed and chip-stack package having the same
摘要 Provided are methods of fabricating semiconductor chips, semiconductor chips formed by the methods, and chip-stack packages having the semiconductor chips. One embodiment specifies a method that includes patterning a scribe line region of a semiconductor substrate to form a semiconductor strut spaced apart from edges of a chip region of the semiconductor substrate.
申请公布号 US7544538(B2) 申请公布日期 2009.06.09
申请号 US20070775120 申请日期 2007.07.09
申请人 SAMSUNG ELECTRONIC CO., LTD. 发明人 CHUNG HYUN-SOO;RYU SEUNG-KWAN;CHOI JU-IL;LEE DONG-HO;HWANG SEONG-DEOK
分类号 H01L21/44;H01L21/48;H01L21/50 主分类号 H01L21/44
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