| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical modulator having high-performance optical modulation properties and improved stability. SOLUTION: In the optical modulator which is provided with a substrate 1, optical waveguides 3a and 3b, a buffer layer 2 formed on the substrate, a traveling wave electrode 4 disposed at an upper part of the buffer layer and comprising a central conductor 4a and grounding conductors 4b and 4c, and a ridge part formed in at least a part of the substrate in a region where intensity of an electric field of a high frequency electric signal traveling in the traveling wave electrode is intense and constituted of recessed parts 9a to 9c and wherein the ridge part comprises a ridge part 8a for the central conductor having the central conductor formed at the upper part thereof and a ridge part 8b for the grounding conductor having the grounding conductor formed at the upper part thereof and one of the two optical waveguides is formed in the ridge part for the central conductor, the thickness of the grounding conductor for connection in the recessed parts is thinner than the thicknesses of the central conductor and the adjacent grounding conductor, the recessed parts are disposed substantially symmetrically to a center line provided in the middle of the two optical waveguides and the traveling wave electrode has a structure substantially symmetric with respect to a center line of the central conductor. COPYRIGHT: (C)2009,JPO&INPIT
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