| 摘要 |
An image sensor and a method of manufacturing the sensor. A method of manufacturing an image sensor may include at least one of: Forming a gate over a semiconductor substrate. Sequentially depositing a plurality of insulating films over the semiconductor substrate and the gate. Removing an upper-most insulating film of the plurality of insulating films by dry etching, thus forming a spacer at sides of the gate. Removing other insulating films by wet etching, while maintaining a bottom-most insulating film of the plurality of insulating films over the semiconductor substrate. Attacks may be prevented on a surface of a semiconductor substrate, making it possible to reduce generation of a dark signal, prevent plasma damage by controlling the thickness of a remaining oxide film with ease, and making it possible to improve yield and resolution of an image.
|
