DEVICE FOR REGULATING TEMPERATURE OF PLATE-LIKE MEMBER

摘要

PROBLEM TO BE SOLVED: To solve a problem of a device for regulating temperature of a plate-like member where heating performance to a gas of a temperature regulating object is insufficient. SOLUTION: The temperature regulating device for precisely regulating the temperature of a glass board by an air current regulated up to a prescribed temperature with a precision temperature regulation device includes: a proportional three-way valve 20 for supplying a part of a high temperature first heat medium to a heater 14 and supplying it to a cooler 16 after cooling the residue part of the high temperature first heat medium supplied to a cooling circuit so as to regulate the temperature of the air current passing the heater 14 of a heating circuit and a cooler 16 of the cooling circuit; a heat absorption unit 32 of a heat pump means for absorbing heat to the first heat medium after being cooled with the heater 14; an accumulator 36 for supplying the first heat medium passing the heat absorption unit 32 and the first heat medium passing the cooler 16; and a control part 22 for controlling the proportional three-way valve 20 so as to regulate the air current of the temperature regulation object up to the prescribed temperature by continuously modifying a distribution ratio of the high temperature first heat medium. COPYRIGHT: (C)2009,JPO&INPIT