CIRCUIT FOR A MICROMECHANICAL STRUCTURE-BORNE SOUND SENSOR AND METHOD FOR OPERATING A MICROMECHANICAL STRUCTURE-BORNE SOUND SENSOR

摘要

The invention relates to a circuit for a micromechanical structure-borne sound sensor and a method for operating said sensor, wherein voltages are applied by means of a voltage generator to at least one micromechanical element serving to detect structure-borne sound such that a change to the micromechanical element occurs. The invention further relates to an analysis circuit, which records and analyses at least one electrically detectable parameter of the micromechanical element using a sampling rate. The at least one parameter is then altered as a result of the change. The invention also proposes a clock generator provided for generating the sampling rate and generating the cycle. A frequency generator serves for generating the cycle at least temporarily for the test operation, wherein the frequency generator generates the cycle as a multiple or as a factor of the sampling rate.