| 摘要 |
PROBLEM TO BE SOLVED: To provide an abrasive sheet capable of dispensing with replacement work. SOLUTION: This abrasive sheet 1 used bondedly onto a rotary table of a polisher is provided with the first circular abrasive sheet piece 12, and three polishing areas 11A, 21A, 31A provided concentrically on a surface of the first abrasive sheet piece 12, each of the polishing areas 11A, 21A, 31A is constituted of an abrasive material of uniform particle size, and the particle size of the abrasive material is made to get small along toward an inner side of the polishing areas. COPYRIGHT: (C)2009,JPO&INPIT
|
