发明名称 SEMICONDUCTOR APPARATUS AND METHOD OF MANUFACTURING THE SAME
摘要 <P>PROBLEM TO BE SOLVED: To provide a semiconductor apparatus capable of preventing occurrence of cracks in an insulating film between layers under a pad, without reducing a wiring density of the next wiring layer below a surface layer on which a pad for external connection is formed. <P>SOLUTION: A thickness of a wiring 3a, passing under a region of a pad 1 among wirings formed on the next layer below a surface layer, is set smaller than that of a wiring 3b which is arranged deviating from under the region of the pad 1. <P>COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009124057(A) 申请公布日期 2009.06.04
申请号 JP20070298747 申请日期 2007.11.19
申请人 PANASONIC CORP 发明人 SAKASHITA TOSHIHIKO;TAKAHASHI MASAO
分类号 H01L21/3205;H01L21/60;H01L23/52 主分类号 H01L21/3205
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