| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a resonance apparatus for obtaining excellent resonance characteristics without causing insertion loss due to parasitic capacitance and to provide a manufacturing method thereof. <P>SOLUTION: The resonance apparatus is a BAW resonator including a support substrate 1 and a resonator 3 formed on one surface side of the support substrate 1. The resonator 3 comprises a columnar (cylindrical) core electrode 31 erected in the thickness direction of the support substrate 1 on one surface side of the support substrate 1, a piezoelectric material part 32 covering the outer peripheral surface of the core electrode 31, and an outer electrode 33 covering the outer peripheral surface of the piezoelectric material part 32. In this case, in the resonator 3, the outer peripheral shapes of the core electrode 31, the piezoelectric material part 32 and the outer electrode 33 respectively are circular on a cross section orthogonal to the thickness direction of the support substrate 1, and the core electrode 31, the piezoelectric material part 32 and the outer electrode 33 are concentrically formed. <P>COPYRIGHT: (C)2009,JPO&INPIT |
