ELECTRIC FIELD EFFECT READ/WRITE HEAD, STORAGE APPARATUS ADOPTING THE SAME, AND MANUFACTURING METHOD OF ELECTRIC FIELD EFFECT READ/WRITE HEAD

摘要

An electric field recording and playing head, an electric field recording and playing device including the same and a manufacturing method of the same are provided to improve the processing efficiency by continually performing a bearing pattern forming process and a recording playing unit forming process. An electric field recording and playing head comprises: a semiconductor substrate(10); a concave groove(13) caved in an upper side contacting a recording medium of the semiconductor substrate; and a recording playing part(30) located within the concave groove. In the upper side of the semiconductor substrate, an air bearing pattern(20) is formed. The recording playing part protrudes to a recording side and takes a shape of not being protruding than the air bearing pattern.