| 摘要 |
PROBLEM TO BE SOLVED: To provide an inorganic EL element which improves luminance by irradiating a laser on a light emitting layer containing sulfur, capable of further improving the luminance by laser irradiation. SOLUTION: In the manufacturing method of the inorganic EL element, a lower electrode 12, a lower insulating layer 13, a light emitting layer 14 formed of SrS:Cu and Ag as a light emitting layer containing the sulfur, an upper insulating layer 16, and an upper electrode 17 are sequentially formed on a glass substrate 11. The manufacturing method includes a process for forming a cap layer 15 formed by adding the sulfur to the insulating layer mainly containing silicon oxide as a layer containing the sulfur on the light emitting layer 14 after forming the light emitting layer 14, a process for irradiating the laser on the light emitting layer 14 through the cap layer 15 from above the cap layer 15, and a process for subsequently forming the upper insulating layer 16 on the cap layer 15. COPYRIGHT: (C)2009,JPO&INPIT
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