| 摘要 |
PROBLEM TO BE SOLVED: To provide a high-speed, high-sensitivity surface incident photodiode. SOLUTION: An optical signal is made incident on a light absorbing layer in an oblique direction by having its optical path changed using an inclined-plane reflective part to increase an effective absorption layer thickness, thereby sensitivity is made high. Further, a diffraction grating or photonic crystal reflection portion on a photodetection portion reflects the optical signal in the direction opposite to the incident direction to make the sensitivity higher without increasing a photodetection portion area. COPYRIGHT: (C)2009,JPO&INPIT |
