| 摘要 |
Objective and Task - To provide a gas supply system that can reduce the capacity of the pipe necessitating purging for the purification accompanying the installation/removal processes upon replacement of the filled container and inspection of the piping unit (referred to hereinafter as "container replacement and other processes"), minimize the feed gas amount evacuated through purging, and maintain stability by swift processing of the feed gas filled container by means of simple structure. Means of Solution - Gas supply system characterized in that pipe Lo having on-off valve Va1 located in the proximity of the container valve 1a, and on-off valve Vb, located in the vicinity of the primary side of the pressure regulation unit 3 at both ends is provided, and at the same time characterized in that purging process unit 5 comprising the decompression process unit and the inert gas supply unit is connected via on-off valve Vc to pipe La connecting the container valve 1a and the on-off valve Va. |
