发明名称 SERVER AND PROGRAM
摘要 A server device includes: an abnormality information output unit for storing a plurality of measurement information, which is time sequential information related to information measured in a plurality of manufacturing apparatuses, having manufacturing apparatus identifiers and time information, and storing at least one set of abnormality information indicating an abnormality and one or more measurement information, and outputting one or more abnormality information; a chart composing unit for composing one or more charts from one or more measurement information in pair with one or more abnormality information corresponding to an abnormality information instruction when the instruction, which is an instruction for one or more abnormality information among the one or more abnormality information outputted by the abnormality information output unit, is received; and an output unit for outputting the one or more charts composed by the chart composing unit, so that abnormality analysis can be carried out easily and efficiently.
申请公布号 US2009138118(A1) 申请公布日期 2009.05.28
申请号 US20070299530 申请日期 2007.04.24
申请人 TOKYO ELECTRON LIMITED 发明人 INOKAWA TAKUMI;KOYAMA NORIAKI
分类号 G06F19/00;G06F3/048;H01L21/02 主分类号 G06F19/00
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