| 摘要 |
<P>PROBLEM TO BE SOLVED: To remove asymmetry of output in the Z-axis direction, when detecting each acceleration in the X-axis direction and in the Z-axis direction. <P>SOLUTION: A first silicon substrate 10 of a first semiconductor chip 1 and a first silicon substrate 10 of a second semiconductor chip 2 are laminated together, and a component A<SB>1</SB>showing vibration of a variable electrode 15 from the second silicon substrate 11 side of the first semiconductor chip 1 to the first silicon substrate 10 side in an output from the first semiconductor chip 1, and a component B<SB>2</SB>showing vibration of the variable electrode 15 from the second silicon substrate 11 side of the second semiconductor chip 2 to the first silicon substrate 10 side in an output from the second semiconductor chip 2 are combined together by a filter circuit 3b, and output as a sensor output. Hereby, asymmetry of an output waveform to which damping of the variable electrode 15 is reflected in each semiconductor chip 1, 2 is removed. <P>COPYRIGHT: (C)2009,JPO&INPIT |
