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发明名称
摘要
申请公布号
JP4267337(B2)
申请公布日期
2009.05.27
申请号
JP20030023291
申请日期
2003.01.31
申请人
发明人
分类号
H01L21/8242;H01L27/10;H01L27/108
主分类号
H01L21/8242
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代理人
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