| 摘要 |
PROBLEM TO BE SOLVED: To provide a method which can be suitably used for synthesizing a superconductor using a copper oxide. SOLUTION: A state is made in which a metal oxide layer 103 composed of RE<SB>2</SB>CuO<SB>4+δ</SB>or AECuO<SB>2+δ</SB>containing excessive oxygen is formed on a crystal substrate 101 by heating (main baking) in a condition of 850°C in a tubular furnace in which an oxygen-nitrogen mixed gas is supplied in a state that the oxygen partial pressure is held at 100.325 Pa to make a low-oxygen atmosphere having a smaller oxygen partial pressure than the atmospheric air. Then, the crystal substrate 101 on which the metal oxide layer 103 is formed is heated in a condition of, for example, 440°C-10 min in a vacuum as a depressurized atmosphere which has a lower pressure than the atmospheric pressure to remove oxygen from the metal oxide layer 103 to make an oxide having a stoichiometric composition of RE or AE, copper, and oxygen and make a state that a superconductor thin film 104 is formed on the crystal substrate 101. COPYRIGHT: (C)2009,JPO&INPIT
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