| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a laminate for piezoelectric actuator in which a surface individual electrode and an internal electrode formed between piezoelectric layers can accurately be positioned, to provide its manufacturing method, and to provide a piezoelectric actuator. <P>SOLUTION: In the laminate 23 for the piezoelectric actuator in which one outer surface of a plurality of laminated piezoelectric layers becomes a surface where a plurality of surface individual electrodes 10 are provided, small holes 17 for passing light through are formed at the internal electrode 15 clamped by the piezoelectric layers, and a slit 20 is formed at an external common electrode 12 so as not to interrupt the light passing through the respective small holes 17. <P>COPYRIGHT: (C)2009,JPO&INPIT |
