发明名称 |
CONTROLLED AND SELECTIVE FORMATION OF CATALYST NANAOPARTICLES |
摘要 |
A method for forming catalyst nanoparticles on a substrate and a method for forming elongate nanostructures on a substrate using the nanoparticles as a catalyst are provided. The methods may advantageously be used in, for example, semiconductor processing. The methods are scalable and fully compatible with existing semiconductor processing technology. Furthermore, the methods allow forming catalyst particles and elongate nanostructures at predetermined locations on a substrate.
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申请公布号 |
US2009131245(A1) |
申请公布日期 |
2009.05.21 |
申请号 |
US20070935998 |
申请日期 |
2007.11.06 |
申请人 |
INTERUNIVERSITAIR MICROELEKTRONICA CENTRUM (IMEC) |
发明人 |
ESCONJAUREGUI SANTIAGO CRUZ;WHELAN CAROLINE |
分类号 |
B01J23/00;B82B1/00;B82B3/00;D01F9/12;H01L21/04 |
主分类号 |
B01J23/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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