| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a lanthanum oxide compound of excellent electrical insulation and an intended dielectric constant stably at a high yield. SOLUTION: The number of H<SB>2</SB>O molecules, the number of CO molecules and the number of CO<SB>2</SB>molecules in the atmosphere for forming the lanthanum oxide compound are set to one-half or less, one-fifth or less and one-tenth or less per one lanthanum atom, respectively. Lanthanum, at least one kind selected from a group consisting of: aluminum; titanium; zirconium; and hafnium, and oxygen which is included so that at least 20 oxygen molecules are included per one lanthanum atom, are simultaneously supplied to the substrate. On the substrate, the lanthanum oxide compound including at least one kind selected from a group consisting of aluminum, titanium, zirconium and hafnium, is formed on the substrate. COPYRIGHT: (C)2009,JPO&INPIT
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