| 摘要 |
PROBLEM TO BE SOLVED: To improve an SN ratio of an image signal of a defect spot by adjusting an incident azimuth of each illumination light at a suitable angle for a pattern on a sample, when performing visual inspection of the sample by illuminating the sample with illumination light entering the sample obliquely with respect to the optical axis of an objective lens of a microscope, and by acquiring a sample image. SOLUTION: An illumination device is equipped with: a light guide 40 having emission ends 42a-42d emitting illumination lights La-Ld to enter the sample 2 obliquely with respect to the optical axis AX of the objective lens of the microscope; and an emission end rotation part 50 for rotating each position of the emission ends 42a-42d by using the optical axis AX as a rotation axis. COPYRIGHT: (C)2009,JPO&INPIT
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