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发明名称
CLEANING AND DRYING APPARATUS AND A CLEANING AND DRYING METHOD
摘要
申请公布号
KR20090050934(A)
申请公布日期
2009.05.20
申请号
KR20080085295
申请日期
2008.08.29
申请人
FUJITSU LIMITED
发明人
NOMURA MICHINAO;KUBO MITSURU;FUKASAWA CHUJIRO
分类号
H01L21/304
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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