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发明名称
DEVICE FOR WETTING BUMPS OF A SEMICONDUCTOR CHIP WITH A LIQUID SUBSTANCE
摘要
申请公布号
EP2059945(A1)
申请公布日期
2009.05.20
申请号
EP20070819979
申请日期
2007.08.28
申请人
OERLIKON ASSEMBLY EQUIPMENT AG, STEINHAUSEN
发明人
WERNE, DOMINIK;BAUMANN, DAMIAN
分类号
H01L21/00;B23K3/06;H01L23/485;H05K3/34
主分类号
H01L21/00
代理机构
代理人
主权项
地址
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