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发明名称
Verfahren und Vorrichtung zum Schleusen eines Substrats in eine und aus einer Vakuumbeschichtungsanlage
摘要
申请公布号
DE112008000006(A5)
申请公布日期
2009.05.14
申请号
DE200811000006T
申请日期
2008.06.23
申请人
VON ARDENNE ANLAGENTECHNIK GMBH
发明人
SCHULZE, DIETMAR;HECHT, HANS-CHRISTIAN;KRAUSE, JOCHEN;HOFMANN, MICHAEL
分类号
B05C15/00
主分类号
B05C15/00
代理机构
代理人
主权项
地址
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