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发明名称
KOMBINATORISCHES RÖNTGENDIFFRAKTOMETER
摘要
申请公布号
DE60041906(D1)
申请公布日期
2009.05.14
申请号
DE20006041906
申请日期
2000.05.22
申请人
JAPAN SCIENCE AND TECHNOLOGY AGENCY, KAWAGUCHI;RIGAKU CORP.
发明人
KOINUMA, HIDEOMI;KAWASAKI, MASASHI;OMOTE, KAZUHIKO;KIKUCHI, TETSUO
分类号
G01N23/207;G01N23/20;H01L21/66
主分类号
G01N23/207
代理机构
代理人
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