发明名称 HEATING APPARATUS
摘要 <p>Provided is a heating unit which can be easily repaired and maintained. In the heating unit (101), planar heat generating bodies (131a, 131b) are arranged between an inner shell (111) and outer shells (121a, 121b), and the outer shells (121a, 121b) are removably bonded to the inner shell (111) by a screw (151). On the circumferences of the planar heat generating bodies (131a, 131b), O-rings (141a, 141b) are arranged, and the planar heat generating bodies (131a, 131b) are prevented from being exposed to an external gas.</p>
申请公布号 WO2009060766(A1) 申请公布日期 2009.05.14
申请号 WO2008JP69631 申请日期 2008.10.29
申请人 EAGLE INDUSTRY CO., LTD.;SAITO, KENJI;KOMINO, MITSUAKI 发明人 SAITO, KENJI;KOMINO, MITSUAKI
分类号 H01L21/205;C23C16/46;H05B3/20 主分类号 H01L21/205
代理机构 代理人
主权项
地址