| 摘要 |
PROBLEM TO BE SOLVED: To provide a position control method for a rotating structure for implementing position control with high precision and for contributing to creation of a process or the like with high precision. SOLUTION: The method comprises: a first step of calculating an angle errorΔθby using a torsional stiffness coefficient K<SB>θ</SB>of the rotating structure; a second step of calculating positional errorsδY,δZ caused by a correction of the angle errorΔθby using a deflection stiffness coefficient K<SB>δ</SB>of the rotation structure; and a third step of outputting the angle errorΔθ, and positional errorsδY,δZ as correction amounts. According to the method, even if the positional error is generated in an axial direction except a rotational axis direction due to an angle correction, the method can correct the positional errors and execute position control with high precision. COPYRIGHT: (C)2009,JPO&INPIT
|
