发明名称 METAL COMPOUND DOTS DIELECTRIC PIECE
摘要 A dielectric piece includes an energy barrier layer and a plurality of crystalline metal compound dots distributed in the energy barrier layer. The material of the crystalline metal compound dots is different from that of the energy barrier layer. Due to its capability of retaining charges, the dielectric piece of the present invention meets the requirements of semiconductor devices in this and the next generation so as to be applied to complementary metal oxide semiconductors (CMOS), non-volatile memory devices, or capacitors as inter-gate dielectric layers, charge storage layers, or dielectric layers of capacitors.
申请公布号 US2009124483(A1) 申请公布日期 2009.05.14
申请号 US20090356064 申请日期 2009.01.19
申请人 INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE 发明人 LIN CHA-HSIN;TZENG PEI-JER;SIDDHESWAR MAIKAP
分类号 C04B35/462;C04B35/03;C04B35/48 主分类号 C04B35/462
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