| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an irradiation position detecting device that is miniaturized, an irradiation position correcting tool set, and a laser beam machining apparatus. <P>SOLUTION: There are provided: an irradiation position detecting device 103 having a detection surface 105, on which optical sensors 104 for detecting a laser beam 45 are disposed in a grid pattern, and outputting each of detected signals of the optical sensors 104; and a placement base body 101 forming a placement surface 102, on which a plurality of base parts 140A-140D and the irradiation position detecting device 103 are placed, on a working surface 51. The number of leg-receiving bodies 120A having the same height are attached to a connection plate, which number corresponds to the number of the base parts 140A-140D. The placement surface 102 is formed with the base parts 140A-140D, into which the leg-receiving bodies 120A inserted respectively, and the support legs of the irradiation position detecting device 103 are engaged with the leg-receiving bodies 120A. Thus, the position of the irradiation position detecting device 103 is changed while keeping the detection surface 105 at a constant height in the placement surface 102. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
