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发明名称
Level sensor for lithographic apparatus
摘要
申请公布号
EP1439428(A3)
申请公布日期
2009.05.13
申请号
EP20040075080
申请日期
2004.01.13
申请人
ASML NETHERLANDS B.V.
发明人
TEUNISSEN, PAULUS ANTONIUS ANDREAS;BROODBAKKER, PETRUS JOHANNES MARIA;QUEENS, RENE MARINUS GERARDUS JOHAN
分类号
G03F7/20;G03F7/207;G03F9/00
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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