发明名称 |
Analyzing chamber including a leakage ion beam detector and mass analyzer including the same |
摘要 |
In an analyzing chamber for a mass analyzer, a body of the analyzing chamber may include an inlet through which an ion beam enters and an outlet through which the ion beam leaves. A shielding section may be installed on a sidewall. The shielding section may prevent the ion beam traveling along a path in the body from causing damage to the sidewall of the body. A detector may be interposed between the sidewall of the body and the shielding section. The detector may detect an ion beam leaking through the shielding section. Accordingly, damage to the sidewall of the body may be sufficiently reduced and/or prevented.
|
申请公布号 |
US7531792(B2) |
申请公布日期 |
2009.05.12 |
申请号 |
US20060489437 |
申请日期 |
2006.07.20 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
EARM HYUN-SUB;LEE SEUNG-SE;KIM YOUNG-DAE;KANG GON-SU;AN SUNG-YEUL |
分类号 |
B01D59/44;A61N5/00;G21C11/00;G21F1/00;G21F3/00;G21F5/00;G21F7/00;H01J1/50;H01J49/00 |
主分类号 |
B01D59/44 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|