A GATE VALVE DEVICE, A VACUUM PROCESS DEVIDE AND A METHOD OF OPENING AND CLOSING A VALVE BODY IN THE GATE VALVE DEVICE,申请号KR20080098326-传众专利搜索

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发明名称	A GATE VALVE DEVICE, A VACUUM PROCESS DEVIDE AND A METHOD OF OPENING AND CLOSING A VALVE BODY IN THE GATE VALVE DEVICE
摘要
申请公布号	KR20090047349(A)	申请公布日期	2009.05.12
申请号	KR20080098326	申请日期	2008.10.07
申请人	TOKYO ELECTRON LIMITED	发明人	NABEYAMA YUKI
分类号	H01L21/205;G02F1/13;H01L21/02;H01L21/68	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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