发明名称 GAS-PANEL ASSEMBLY
摘要 A gas-panel manifold for use in a gas-panel assembly is disclosed. A manifold in the assembly provides a plurality of support surfaces, each designed for supporting a gas-component thereon, and internal passageways disposed within the manifold body for connecting gas components, with such carried on the manifold, for gas flow through the manifold in a generally downstream direction. The adjacent support surfaces in the manifold are in different planes, representing different heights above the support.
申请公布号 US2009114295(A1) 申请公布日期 2009.05.07
申请号 US20070935940 申请日期 2007.11.06
申请人 ULTRA CLEAN HOLDINGS, INC. 发明人 MILBURN MATTHEW L.;WIER BRUCE C.;KRISHNAN SOWMYA
分类号 F16K27/00;B21D39/00;F16K1/06 主分类号 F16K27/00
代理机构 代理人
主权项
地址