发明名称 |
APPARATUS AND METHODS FOR A SUBSTRATE CARRIER HAVING AN INFLATABLE SEAL |
摘要 |
The present invention provides systems, methods, and apparatus for use with a substrate carrier. The invention provides a door opener adapted to employ a vacuum source to collapse an inflatable seal of a door of the substrate carrier. By collapsing the inflatable seal, the door is released from the body of the substrate carrier so that substrates may be removed and/or inserted into the carrier. A second vacuum source may be applied to the door to hold it securely to the door opener. Numerous other aspects of the invention are disclosed.
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申请公布号 |
WO2007061604(A3) |
申请公布日期 |
2009.05.07 |
申请号 |
WO2006US42953 |
申请日期 |
2006.10.30 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
RICE, MICHAEL, R.;ELLIOTT, MARTIN, R. |
分类号 |
B65B69/00 |
主分类号 |
B65B69/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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