| 摘要 |
An inertia force sensor includes a detection element (1) having two orthogonal arms each formed by connecting one first arm (2) orthogonally to two second arms (4); a support portion (6) for supporting the two first arms (2); and two fixing arms (8) connected at one end thereof to the support portion (6) and fixed at the other end thereof to a mounting substrate. The second arms (4) include opposing portions (16) formed by bending the second arms (4) to face the main portions thereof. The second arms (4) are connected at their ends to weight parts (11), which include recesses (12) to which the ends of the second arms (4) are connected.
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