发明名称 Ferroelectric thin film formation composition, ferroelectric thin film and method of fabricating ferroelectric thin film
摘要 Provided are a ferroelectric thin film formation composition, a ferroelectric thin film and a method of fabricating a ferroelectric thin film, the ferroelectric thin film formation composition being capable of effectively preventing occurrence of a striation and expanding the range of choice of a sol composition. A ferroelectric thin film formation composition containing a metal compound that is a material to form a ferroelectric thin film contains a hydrophobic compound which includes a reactive group reacting with a hydroxy group and in which at least an end side of a remnant exclusive of the reactive group has a hydrophobic property wherein the reactive group is at least one of a silane halide, a hydroxysilane and an alkoxysilane. Thus, it is possible to expand the range of choice of the sol composition while effectively suppressing occurrence of the striation.
申请公布号 US7527822(B2) 申请公布日期 2009.05.05
申请号 US20070951580 申请日期 2007.12.06
申请人 SEIKO EPSON CORPORATION 发明人 SUMI KOJI
分类号 C04B35/622;H01L21/02;B41J2/16;C01G25/00;C01G99/00;C23C18/12;H01B3/10;H01B3/20;H01L41/09;H01L41/18;H01L41/187;H01L41/22;H01L41/24 主分类号 C04B35/622
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