发明名称 Semiconductor device
摘要 A semiconductor device according to an embodiment of the present invention includes a semiconductor substrate; a ferroelectric capacitor arranged above the semiconductor substrate; an insulating protecting film covering a side surface of the ferroelectric capacitor; and a side wall film formed on a side surface of the ferroelectric capacitor through the protecting film and giving tensile stress to the ferroelectric capacitor in a direction of an electric field applied to the ferroelectric capacitor.
申请公布号 US7527984(B2) 申请公布日期 2009.05.05
申请号 US20060482909 申请日期 2006.07.10
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 YAMAKAWA KOJI;YAMAZAKI SOICHI
分类号 H01L21/00 主分类号 H01L21/00
代理机构 代理人
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