发明名称 |
Fast localization of electrical failures on an integrated circuit system and method |
摘要 |
Fast localization of electrically measured defects of integrated circuits includes providing information for fabricating a test chip having test structures configured for parallel electrical testing. The test structures on the test chip are electrically tested employing a parallel electrical tester. The results of the electrical testing are analyzed to localize defects on the test chip.
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申请公布号 |
US7527987(B2) |
申请公布日期 |
2009.05.05 |
申请号 |
US20050538538 |
申请日期 |
2005.06.10 |
申请人 |
PDF SOLUTIONS, INC. |
发明人 |
CIPLICKAS DENNIS;HESS CHRISTOPHER;LEE SHERRY;WEILAND LARG |
分类号 |
H01L21/66;G01R1/04;G01R19/00;G01R31/26;G01R31/28;G01R31/307;H01L;H01L21/20;H01L21/44;H01L23/544 |
主分类号 |
H01L21/66 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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