发明名称 Fast localization of electrical failures on an integrated circuit system and method
摘要 Fast localization of electrically measured defects of integrated circuits includes providing information for fabricating a test chip having test structures configured for parallel electrical testing. The test structures on the test chip are electrically tested employing a parallel electrical tester. The results of the electrical testing are analyzed to localize defects on the test chip.
申请公布号 US7527987(B2) 申请公布日期 2009.05.05
申请号 US20050538538 申请日期 2005.06.10
申请人 PDF SOLUTIONS, INC. 发明人 CIPLICKAS DENNIS;HESS CHRISTOPHER;LEE SHERRY;WEILAND LARG
分类号 H01L21/66;G01R1/04;G01R19/00;G01R31/26;G01R31/28;G01R31/307;H01L;H01L21/20;H01L21/44;H01L23/544 主分类号 H01L21/66
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