| 摘要 |
PROBLEM TO BE SOLVED: To provide a three-dimensional shape measuring method for acquiring measurement data with extremely high accuracy even if a measured object has an aspheric shape. SOLUTION: According to this three-dimensional shape measuring method, the shape of a measured object is measured by causing a probe to scan a measurement surface of the measured object along a prescribed route, the probe supported movably in a Z-axis direction on a movable body driven in X-axis and Y-axis directions orthogonal to each other. In measurement, sampling intervals for acquiring measurement data on the basis of a travel of the movable body moving in X-Y directions, are calculated from the radius of an approximate circle: the approximate circle is a circle touching the surface shape of the measured object in a position on the surface and having, as its center, a point at which a straight line intersects a center line of the measured object, the straight line drawn in the direction normal to the measured surface of the measured object at each scanning position acquired from already-acquired shape information on the measured object. Thus, measurement data can be taken in at fixed intervals in a direction paralleling the surface shape of the measured object. COPYRIGHT: (C)2009,JPO&INPIT
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