| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a surface polishing machine which carries out surface polishing of a workpiece by pressing the same to a polisher in rotation, wherein the surface polishing machine allows even a not-so-skilled operator to carry out surface polishing of the workpiece with high precision while maintaining the polisher in a high flatness at every moment in process. <P>SOLUTION: The surface polishing machine 1 is formed of a rotatably supported surface table 5, and the polisher 6 stuck to an upper surface of the surface table 5. The polisher 6 is provided with an asperity reading unit 2 for fetching asperity shape data of the polisher 6, and the asperity reading unit 2 is provided with an asperity correcting unit 3 for correcting asperities of the polisher 6, based on the asperity shape data. When the workpiece is surface-polished, the asperity data of the polisher 6 is fetched by the asperity reading unit 2 in real time, and fed-back to the asperity correcting unit 3 which then corrects the asperities of the polisher 6, based on the asperity shape data. <P>COPYRIGHT: (C)2009,JPO&INPIT |
