发明名称 Piezoelectric resonator and method for manufacturing thereof
摘要 A piezoelectric resonator includes a resonator substrate, a base substrate supporting the resonator substrate, a lid substrate covering a surface of the resonator substrate, the surface being on an opposite side of a surface facing the base substrate, a first excitation electrode formed on the surface of the resonator substrate facing the lid substrate, a second excitation electrode formed on the surface of the resonator substrate facing the base substrate, and a third electrode provided on the surface of the resonator substrate facing the base substrate, the third electrode being electrically connected to the first excitation electrode through a concave portion which is formed on a side surface of the resonator substrate.
申请公布号 US2009106960(A1) 申请公布日期 2009.04.30
申请号 US20080314900 申请日期 2008.12.18
申请人 EPSON TOYOCOM CORPORATION 发明人 TSUCHIDO KENJI
分类号 H01L41/22 主分类号 H01L41/22
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