发明名称 METHODS AND APPARATUS FOR STARTING AND OPERATING A THERMAL ABATEMENT SYSTEM
摘要 <p>A flame sensor apparatus for use with a flame heated thermal abatement reactor is provided, including a flame sensor adapted to sense a flame within the thermal abatement reactor; and a shutter adapted to selectively block the transmission of radiation from the flame to the flame sensor.</p>
申请公布号 WO2009055660(A1) 申请公布日期 2009.04.30
申请号 WO2008US81098 申请日期 2008.10.24
申请人 APPLIED MATERIALS, INC.;CHIU, HO-MAN, RODNEY;CLARK, DANIEL, O.;CRAWFORD, SHAUN, W.;JUNG, JAY, J.;LOLDJ, YOUSSEF, A.;VERMEULEN, ROBBERT 发明人 CHIU, HO-MAN, RODNEY;CLARK, DANIEL, O.;CRAWFORD, SHAUN, W.;JUNG, JAY, J.;LOLDJ, YOUSSEF, A.;VERMEULEN, ROBBERT
分类号 F23N5/08 主分类号 F23N5/08
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