| 摘要 |
An ultrasonic cleaning apparatus is provided to effectively remove particles of a micro size by oscillating ultrasonic waves having a different frequency. An ultrasonic cleaning apparatus(100) includes a cleaning bath(110) and a plurality of vibration generation parts(120). A floor surface of the cleaning bath is tilted into a V shape. The cleaning bath stores a cleaning solution. A plurality of vibration generation parts is included in an outer side of the floor surface. The vibration generation parts generate ultrasonic waves of a different frequency. The floor surface is formed by coupling a first surface with a second surface into a V shape. The first surface and the second surface has an angle of 90 ~ 180°.
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